Photolithography

This process produces extremely small, accurate patterns in thin film materials. These patterns can be applied on glass, plastic, ceramics and other vacuum compatible substrates. The thin film material, on the substrate can be patterned by etching or by a process called photo-liftoff.

Patterned coatings can be used for a variety of applications, including test charts, reticules, apertures, gray scale, Gaussian patterns, ronchi rulings, bar codes, electrical circuits, gratings, encoders, photo masks, optical targets, cross hairs, alignment patterns, resolution patterns, QC patterns, pinholes, optical slits, and angle measuring devices.

The coated patterns can be made from hard all-dielectric coating materials as well as other standard metallic materials such as chrome, gold and aluminum.